"?*File list" "\Version: 0x05120000" "\Date: 12:27:09 PM Wed Apr 18 2012" "\Start context: OL2BIG" "\Data length: 40960" "\Engage X Pos: -19783.4 um" "\Engage Y Pos: -42151.3 um" "\*Equipment list" "\Description: BioScope II" "\Microscope: BioScope II" "\Extender: None" "\Sensor: None" "\Vision: Hauppauge WinTV Capture" "\Scanner file: 1b3b4bio2.scn" "\*Scanner list" "\Scanner type: BioII" "\Serial Number: 1B3B4Bio2" "\Piezo size: G" "\File name: 1b3b4bio2.scn" "\Retracted offset der: 28" "\Extended offset der: -36" "\Allow rotation: Allow" "\Piezo cal: 90" "\X max: 90" "\Y max: 90" "\X sensitivity: 1442" "\X derate: 5.7" "\X mag: 0.5" "\X mag1: 0.65" "\X arg: 2.6" "\X round: 0" "\Y sensitivity: 1490" "\Y derate: 6.9" "\Y mag: 0.5" "\Y mag1: 0.75" "\Y arg: 2.6" "\X slow sensitivity: 1485.5" "\X slow derate: 6.25" "\Y fast sensitivity: 1432.5" "\Y fast derate: 5.75" "\X slow-fast coupling: 0" "\X slow-fast coupling derating: 0" "\Y slow-fast coupling: 0" "\Y slow-fast coupling derating: -4.33488e-009" "\Fast cal freq: 2.44" "\Slow cal freq: 1.48201" "\Xs-Yf coupling: 0" "\Xs-Yf coupling derating: 0" "\Ys-Xf coupling: 0" "\Ys-Xf coupling derating: -4.33488e-009" "\X offset sens: 1955" "\Y offset sens: 1950" "\Max scan size: 165" "\Z min: 0" "\Z max: 150" "\Z engage position: 75" "\OptoXY x sensitivity: 1765" "\OptoXY y sensitivity: 1765" "\OptoXY x sens fitted: 1765" "\OptoXY y sens fitted: 1765" "\OptoXY orthog fitted: 0" "\OptoXY pgain/igain: 1" "\ClosedLoop x igain: 0.25" "\ClosedLoop x pgain: 0.25" "\ClosedLoop y igain: 0.25" "\ClosedLoop y pgain: 0.25" "\Z range sens: 137.212" "\Z sensor sens: 1039.51" "\Z CL range factor: 0.8" "\Z CL IGain: 2.9" "\Z CL PGain: 2.5" "\Laser Stage ZLink Gain: 0.59" "\Laser Stage ZLink Offset: -4.5" "\CapVsX: -36.3715" "\CapHsX: 333073" "\CapAmpX: -1.14138e+007" "\CapVsY: -35.6214" "\CapHsY: 326047" "\CapAmpY: -1.10257e+007" "\CapVsZ: -91.7984" "\CapHsZ: 92011.8" "\CapAmpZ: -8.4468e+006" "\@Sens. Zsens: V 86.07892 nm/V" "\@Sens. CurrentSens: V 10.00000 nA/V" "\@Sens. SECPMSens: V 100.0000 mV/V" "\@Sens. Xsensor: V 11462.66 nm/V" "\@Sens. Ysensor: V 11920.71 nm/V" "\*Ciao scan list" "\Parameter select: Main" "\Operating mode: Image" "\Scan Size: 100000 nm" "\X Offset: 0 nm" "\Y Offset: 0 nm" "\Rotate Ang.: 0" "\Samps/line: 512" "\Lines: 512" "\Y disable: Enabled" "\Aspect Ratio: 1:1" "\Bidirectional Scan: Disabled" "\Scan line shift: 0" "\Scan Rate: 0.200115" "\Dark Lift Delay: 300" "\CD Mode: Disabled" "\PrpGain: 0.5" "\IntGain: 0.5" "\PIDErr: 0.0152588" "\tappFilterCutoff: 100" "\dithFilterCutoff: 100" "\LocHighLowDistance: 200" "\SlopeOutOffset: 0.5" "\SlopeOutLimit: 0.5" "\PointLag: 100" "\RcrsvAvg: 100" "\AvTipState: 100" "\microstepSize: 5" "\zxRatio: 10" "\dataStepAdj: 1" "\debugData: Standard" "\Amplitude X: 0" "\Amplitude Y: 0" "\Phase X: 0" "\Phase Y: 0" "\spare0: 0" "\spare1: 0" "\spare2: 0" "\spare3: 0" "\spare4: 0" "\spare5: 0" "\Tip Velocity: 40.0231" "\Minimum scan rate: 0.1" "\Lift rate: 4" "\X drift: 0" "\Y drift: 0" "\Step XY size: 300" "\Cycles: 10" "\Step XY period: 0.005" "\Step size: 3" "\Units: Metric" "\Color table: 2" "\Scope dualtrace: Dual" "\Auto X Sep: 0" "\Auto Y Sep: 0" "\Auto pattern: Linear" "\Auto number: 2" "\Capture direction: Down" "\Capture prelines: 50" "\Engage Setpoint: 0.85" "\Min int. gain: 1" "\Parameter Update Retract: Enabled" "\Drive feedback: Disabled" "\Drive time: 0" "\Drive setpoint: 1" "\Drive gain: 80" "\Start size: 13199.8 nm" "\Pass 2 size: 10000 nm" "\Pass 3 size: 5000 nm" "\Pass 4 size: 2000 nm" "\Feature scan angle: 0" "\Feature Scan rate: 1" "\Feature step size: 0.138889" "\Feature setpoint: 0.8" "\Feature threshold: 2000" "\Pass delay: 5" "\Z offset: 0" "\Z tolerance: 3237.22" "\Engage X offset: 0 nm" "\Engage Y offset: 0 nm" "\Engage step size: 0.138889" "\Engage Z sens.: 12.5" "\Engage Z avg.: 10" "\Engage Z delay: 0.5" "\Extended Current sens: 1 pA/V" "\Bias limit: 12 V" "\AFM Current Sensitivity: 1 nA/V" "\SECPM sens: 100 mV/V" "\Current range: 200 nA" "\Z Range: 20.5818" "\Strip chart : Disabled" "\Strip Chart Rate: 500" "\Strip Chart Size: 100" "\XY Closed Loop: Off" "\OptoXY Do Linear: Off" "\Z Closed Loop: Off" "\Analog2 High Voltage: 0" "\Analog22 High Voltage: 0" "\Output 1 Data Type: Off" "\Output 2 Data Type: Off" "\Meter display ctrl.: Hidden" "\Meter Display Mode: Vertical/RMS" "\Stop motor: Disabled" "\Display level: 127" "\XY Feedback Control: Off" "\Torsional Freq: 950" "\Torsional Q: 1000" "\Sample Rate: 10" "\Sample Points: 128" "\Cycles to Average: 32" "\Harmonics To Correct: 1" "\Max Harmonics: 20" "\Force Data Points: 64" "\Calculation Period: 60" "\Interaction Time: 0.24" "\Invert Torsional: Yes" "\Invert Vertical: Yes" "\Unload Fit Region: 0.7" "\@InterleaveList: S [InterleaveOffMode] "Disabled"" "\@LinearizeList: S [LinearizeOffMode] "modeLinearizeOff"" "\@DarkLiftList: S [] """ "\@FPGA Z Feedback: S [] "On"" "\@MicroscopeList: S [TMMode] "Tapping"" "\@LP Deflection: S [] "Enabled"" "\@LP TM Deflection: S [] "Enabled"" "\@LP Current: S [] "Enabled"" "\@LP Vertical Deflection: S [] "Enabled"" "\@Low Pass Frequency: S [] "Enabled"" "\@LP Friction: S [] "Enabled"" "\@PicoAnglerPollOnOff: S [PicoAnglerPollOff] "Disabled"" "\@ThermalTuneMaxFreq: S [ThermalTuneData500K] "1 - 100 KHz"" "\@TipBiasCntrlList: S [TipBiasCntrlGround] "Ground"" "\@Sample Bias Control: S [] "Ground"" "\@HSADCMuxOnOff: S [HSADCMuxOff] "modeHSADCMuxOff"" "\@HsdcChanADataType: S [HsdcDataTypeDeflection] "Vertical Deflection"" "\@HsdcChanBDataType: S [HsdcDataTypeLateral] "Lateral Deflection"" "\@FastScan List: S [FastScanOff] "Disabled"" "\@FastZFeedback List: S [DigitalZFastScan] "Digital"" "\@TR Mode: S [] "Disabled"" "\@VerticalGainControlList: S [] "Disabled"" "\@SCM Feedback: S [] """ "\@2:HsdcChanCDataType: S [HsdcDataTypeOff] "Off"" "\@3:HsdcChanCDataType: S [HsdcDataTypeOff] "Off"" "\@2:HsdcChanDDataType: S [HsdcDataTypeHeight] "Height"" "\@3:HsdcChanDDataType: S [HsdcDataTypeOff] "Off"" "\@2:HsdcTriggerChan: S [HsdcDataTypeHeight] "Height"" "\@3:HsdcTriggerChan: S [HsdcDataTypeHeight] "Height"" "\@2:SPMFeedbackList: S [SPMFb] "Amplitude"" "\@3:SPMFeedbackList: S [SPMFb] "Amplitude"" "\@2:Drive1Routing: S [] "Tapping Piezo"" "\@3:Drive1Routing: S [] "Tapping Piezo"" "\@2:Drive1Monitor: S [] "Not Available"" "\@3:Drive1Monitor: S [] "Not Available"" "\@2:MainLockInEnableContactMode: S [] """ "\@3:MainLockInEnableContactMode: S [] """ "\@2:MainLockInEnableNonContactMode: S [LockIn1Enabled] "Enabled"" "\@3:MainLockInEnableNonContactMode: S [LockIn1Enabled] "Enabled"" "\@2:MainLockInSource: S [] "Vertical"" "\@3:MainLockInSource: S [] "Vertical"" "\@2:Zmod: S [] "Disabled"" "\@3:Zmod: S [] "Disabled"" "\@2:LateralGainControl: S [LateralGainDisabled] "Disabled"" "\@3:LateralGainControl: S [LateralGainDisabled] "Disabled"" "\@2:InputFbList: S [] "Off"" "\@3:InputFbList: S [] "Off"" "\@2:TR Mode: S [] "Disabled"" "\@3:TR Mode: S [] "Disabled"" "\@2:TRCouplingCheck: S [] """ "\@3:TRCouplingCheck: S [] """ "\@2:LockIn2DDS2Enable: S [LockIn2Disabled] "Disabled"" "\@3:LockIn2DDS2Enable: S [LockIn2Disabled] "Disabled"" "\@2:DDS2HarmonicList: S [] "1"" "\@3:DDS2HarmonicList: S [] "1"" "\@2:LockIn2Source: S [] "Disabled"" "\@3:LockIn2Source: S [] "Disabled"" "\@2:Drive2Routing: S [] "Null"" "\@3:Drive2Routing: S [] "Null"" "\@2:Drive2Monitor: S [] "Not Available"" "\@3:Drive2Monitor: S [] "Not Available"" "\@2:PRLockInTypeList: S [] """ "\@3:PRLockInTypeList: S [] """ "\@2:PiezoACBiasCtrlList: S [] """ "\@3:PiezoACBiasCtrlList: S [] """ "\@2:VerticalGainControlList: S [] "Enabled"" "\@3:VerticalGainControlList: S [] "Enabled"" "\@2:SCM Feedback: S [] """ "\@3:SCM Feedback: S [] """ "\@2:TUNAList: S [TUNAOffMode] "Disabled"" "\@3:TUNAList: S [TUNAOffMode] "Disabled"" "\@2:Drive3Routing: S [] "Null"" "\@3:Drive3Routing: S [] "Null"" "\@2:Drive3Monitor: S [] "Not Available"" "\@3:Drive3Monitor: S [] "Not Available"" "\@2:LockIn3DDS3Enable: S [LockIn3Disabled] "Disabled"" "\@3:LockIn3DDS3Enable: S [LockIn3Disabled] "Disabled"" "\@2:LockIn3Source: S [] """ "\@3:LockIn3Source: S [] """ "\@Sens. DeflSens: V 1.000000 " "\@Sens. ECBiasSens: V 1000.000 mV/V" "\@Sens. AFMSetFastScanSens: V 1.000000 V/V" "\@Sens. ZsensSens: V 1039.513 nm/V" "\@Sens. ZPicoSens: V 1000.000 nm/V" "\@Sens. LSPRAmplitudeSensitivity: V 1.000000 " "\@Sens. HSPRAmplitudeSensitivity: V 1.000000 " "\@Sens. tunaSens: V 10.00000 pA/V" "\@Sens. biassens: V 1.000000 V/V" "\@Sens. testsens: V 1.000000 V/V" "\@Sens. Amplitude: V 1.000000 " "\@Sens. Amplitude Error: V 1.000000 " "\@Sens. Phase: V 1.000000 " "\@Sens. Phase Error: V 1.000000 " "\@Sens. Friction: V 1.000000 " "\@Sens. TM Deflection: V 1.000000 " "\@Sens. Inphase: V 1.000000 " "\@Sens. Quadrature: V 1.000000 " "\@Sens. Raw Deflection: V 1.000000 " "\@Sens. Raw Deflection Gain: V 1.000000 " "\@Sens. Counter 1: V 1.000000 " "\@Sens. Counter 2: V 1.000000 " "\@Sens. Freq. 1: V 1.000000 " "\@Sens. Freq. 2: V 1.000000 " "\@Sens. Fast Z Analog: V 1.000000 " "\@Sens. Fast Z: V 1.000000 " "\@Sens. Fast RMS: V 1.000000 " "\@Sens. Fast Deflection Analog: V 1.000000 " "\@Sens. Fast Deflection Error: V 1.000000 " "\@Sens. Frequency: V 1.000000 " "\@Sens. Potential: V 1.000000 " "\@Sens. TR Amplitude: V 1.000000 " "\@Sens. TR Amplitude Error: V 1.000000 " "\@Sens. TR Phase: V 1.000000 " "\@Sens. Amplitude2: V 1.000000 " "\@Sens. HS PR Phase: V 1.000000 " "\@Sens. dC/dV Amplitude: V 1.000000 " "\@Sens. dC/dV Amplitude Error: V 1.000000 " "\@Sens. dC/dV I: V 1.000000 " "\@Sens. dC/dV Q: V 1.000000 " "\@Sens. dC/dV Phase: V 1.000000 " "\@Sens. Feedback Bias: V 1.000000 " "\@Sens. Resistance (Ohms): V 1.000000 " "\@Sens. Resistance (V): V 1.000000 " "\@Sens. Input1: V 1.000000 " "\@Sens. Input2: V 1.000000 " "\@Sens. Input3: V 1.000000 " "\@Sens. ForceSens: V 1.000000 " "\@Sens. DissipationSens: V 1.000000 " "\@Sens. StiffnessSens: V 1.000000 " "\@Sens. LogStiffnessSens: V 1.000000 " "\@Sample period: V (0.1000000 us/LSB) 10.00000 us" "\@Z center: V [Sens. Zsens] (0.006713867 V/LSB) -75.00061 V" "\@1:ZLimit: V [Sens. Zsens] (0.006713867 V/LSB) 150.0000 V" "\@1:ZLimitRamp: V [Sens. Zsens] (0.006713867 V/LSB) 440.0000 V" "\@1:ForceLimit: V [Sens. ForceSens] (0.06250000 Arb/LSB) 256.0000 Arb" "\@1:DissipationLimit: V [Sens. DissipationSens] (0.06250000 Arb/LSB) 16.00000 Arb" "\@1:StiffnessLimit: V [Sens. StiffnessSens] (0.06250000 Arb/LSB) 128.0000 Arb" "\@1:LogStiffnessLimit: V [Sens. LogStiffnessSens] (0.0004882813 log(Arb)/LSB) 32.00000 log(Arb)" "\@1:AmplitudeLimit1: V (0.0000009313 mV/LSB) 2000.000 mV" "\@1:TRAmplitudeLimit: V (0.0000009313 mV/LSB) 2500.000 mV" "\@1:SCMAmplitudeLimit: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:AmplitudeLimit1LockIn1and2: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:AmplitudeLimit1LockIn1: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:AmplitudeLimit1LockIn2: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:DeflectionLimitLockIn3LSADC1: V (0.0000000057 V/LSB) 24.57600 V" "\@2:DeflectionLimit: V (0.0000000057 V/LSB) 24.57600 V" "\@2:TMDeflectionLimitLockIn3LSADC1: V (0.0000000057 V/LSB) 24.57600 V" "\@2:TMDeflectionLimit: V (0.0000000057 V/LSB) 24.57600 V" "\@2:HSADC2GainLockIn2and1: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:HSADC2GainLockIn2: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:HSADC2GainLockIn1: V (0.0000009313 mV/LSB) 4000.000 mV" "\@2:LSADC2Gain: V (0.0000000057 V/LSB) 24.57600 V" "\@2:LSADC9Gain: V (0.0000000057 V/LSB) 24.57600 V" "\@Lift Start Height: V [Sens. Zsens] (0.002288735 V/LSB) 0 V" "\@Lift Scan Height: V [Sens. Zsens] (0.002288735 V/LSB) 4.506534 V" "\@Drive height: V [Sens. Zsens] (0.002288735 V/LSB) 0 V" "\@2:AFMSetDeflection: V (0.0003662109 V/LSB) 0.5000000 V" "\@3:AFMSetDeflection: V (0.0003662109 V/LSB) 0.5000000 V" "\@2:TMSetAmplitude: V (0.03051758 mV/LSB) 300.0000 mV" "\@3:TMSetAmplitude: V (0.03051758 mV/LSB) 0 mV" "\@2:TMSetDeflection: V (0.0003662109 V/LSB) 0 V" "\@3:TMSetDeflection: V (0.0003662109 V/LSB) 0 V" "\@2:TMSetFastScan: V (0.0003662109 V/LSB) 0 V" "\@3:TMSetFastScan: V (0.0003662109 V/LSB) 0 V" "\@2:AFMSetFastScanAnalog: V [Sens. AFMSetFastScanSens] (0.0003662109 V/LSB) 0 V" "\@3:AFMSetFastScanAnalog: V [Sens. AFMSetFastScanSens] (0.0003662109 V/LSB) 0 V" "\@2:AFMSetFastScanDigital: V [Sens. AFMSetFastScanSens] (0.0003662109 V/LSB) 0 V" "\@3:AFMSetFastScanDigital: V [Sens. AFMSetFastScanSens] (0.0003662109 V/LSB) 0 V" "\@2:STMSetCurrent: V [Sens. CurrentSens] (0.0003750000 V/LSB) 0.1000000 V" "\@3:STMSetCurrent: V [Sens. CurrentSens] (0.0003750000 V/LSB) 10.00000 V" "\@2:TRSetAmplitude: V (0.01525879 mV/LSB) 270.0000 mV" "\@3:TRSetAmplitude: V (0.01525879 mV/LSB) 270.0000 mV" "\@2:SetTRVertDefl: V (0.0003662109 V/LSB) 0 V" "\@3:SetTRVertDefl: V (0.0003662109 V/LSB) 0 V" "\@2:SECPMSetPotential: V [Sens. SECPMSens] (0.0003750000 V/LSB) 2.000000 V" "\@3:SECPMSetPotential: V [Sens. SECPMSens] (0.0003750000 V/LSB) 2.000000 V" "\@2:TMSetPhase: V (0.005493164 º/LSB) 0 º" "\@3:TMSetPhase: V (0.005493164 º/LSB) 0 º" "\@2:DigitalSetPoint: V (0.0003750000 V/LSB) 0.2500000 V" "\@3:DigitalSetPoint: V (0.0003750000 V/LSB) 0.2500000 V" "\@2:TRSetPhase: V (0.005493164 º/LSB) 0 º" "\@3:TRSetPhase: V (0.005493164 º/LSB) 0 º" "\@2:DC Test Bias: V [Sens. testsens] (0.0002929687 V/LSB) 0 V" "\@3:DC Test Bias: V [Sens. testsens] (0.0002929687 V/LSB) 0 V" "\@2:CantFrequency: V (0.0000116415 kHz/LSB) 303.4469 kHz" "\@3:CantFrequency: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:CantFrequencyContactMode: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:CantFrequencyContactMode: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:CantDrive: V (0.3051758 mV/LSB) 42.41943 mV" "\@3:CantDrive: V (0.3051758 mV/LSB) 0 mV" "\@2:CantDriveContactMode: V (0.3051758 mV/LSB) 0 mV" "\@3:CantDriveContactMode: V (0.3051758 mV/LSB) 0 mV" "\@2:CantDriveNulled: V (0.3051758 mV/LSB) 0 mV" "\@3:CantDriveNulled: V (0.3051758 mV/LSB) 0 mV" "\@2:DriveDCOffsetTappingMode: V (0.0003051758 V/LSB) 0 V" "\@3:DriveDCOffsetTappingMode: V (0.0003051758 V/LSB) 0 V" "\@2:DriveDCOffsetNonTapping: V (0.0003051758 V/LSB) 0 V" "\@3:DriveDCOffsetNonTapping: V (0.0003051758 V/LSB) 0 V" "\@2:ReferenceFrequencyTappingMode: V (0.0000116415 kHz/LSB) 303.4469 kHz" "\@3:ReferenceFrequencyTappingMode: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:ReferenceFrequency1: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:ReferenceFrequency1: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:CantPhase: V (0.005493164 º/LSB) -173.6389 º" "\@3:CantPhase: V (0.005493164 º/LSB) 0 º" "\@2:CantPhaseContactMode: V (0.005493164 º/LSB) 0 º" "\@3:CantPhaseContactMode: V (0.005493164 º/LSB) 0 º" "\@2:LockInBW1: V (0.001000000 kHz/LSB) 42.50000 kHz" "\@3:LockInBW1: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@2:LockInBW1ContactMode: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@3:LockInBW1ContactMode: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@2:TRCantileverFrequency: V (0.0000116415 kHz/LSB) 1000.000 kHz" "\@3:TRCantileverFrequency: V (0.0000116415 kHz/LSB) 1000.000 kHz" "\@2:ReferenceFrequencyTRMode: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:ReferenceFrequencyTRMode: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:TROnAnalog3: V (0.0003051758 V/LSB) 10.00000 V" "\@3:TROnAnalog3: V (0.0003051758 V/LSB) 10.00000 V" "\@2:ReferenceFrequency2: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:ReferenceFrequency2: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:ReferenceFrequency2Harmonic: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:ReferenceFrequency2Harmonic: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:DrivePhase2: V (0.005493164 º/LSB) 0 º" "\@3:DrivePhase2: V (0.005493164 º/LSB) 0 º" "\@2:LockIn2BW: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@3:LockIn2BW: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@2:DriveFrequency2: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:DriveFrequency2: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:DriveAmplitude2: V (0.3051758 mV/LSB) 0 mV" "\@3:DriveAmplitude2: V (0.3051758 mV/LSB) 0 mV" "\@2:Drive2 DC Offset: V (0.0003051758 V/LSB) 0 V" "\@3:Drive2 DC Offset: V (0.0003051758 V/LSB) 0 V" "\@2:PRLowSpeedLockinBW: V (0.001000000 kHz/LSB) 0.3000000 kHz" "\@3:PRLowSpeedLockinBW: V (0.001000000 kHz/LSB) 0.3000000 kHz" "\@2:PRLowSpeedDriveAmplitude: V (0.3051758 mV/LSB) 2000.000 mV" "\@3:PRLowSpeedDriveAmplitude: V (0.3051758 mV/LSB) 2000.000 mV" "\@2:PRLowSpeedDriveFrequency: V (0.0000001164 kHz/LSB) 15.00000 kHz" "\@3:PRLowSpeedDriveFrequency: V (0.0000001164 kHz/LSB) 15.00000 kHz" "\@2:PRLowSpeedDrivePhase: V (0.005493164 º/LSB) 0 º" "\@3:PRLowSpeedDrivePhase: V (0.005493164 º/LSB) 0 º" "\@2:PRHighSpeedLockinBW: V (0.001000000 kHz/LSB) 0.7500000 kHz" "\@3:PRHighSpeedLockinBW: V (0.001000000 kHz/LSB) 0.7500000 kHz" "\@2:PRHighSpeedDriveAmplitude: V (0.3051758 mV/LSB) 2000.000 mV" "\@3:PRHighSpeedDriveAmplitude: V (0.3051758 mV/LSB) 2000.000 mV" "\@2:PRHighSpeedDriveFrequency: V (0.0000116415 kHz/LSB) 60.00000 kHz" "\@3:PRHighSpeedDriveFrequency: V (0.0000116415 kHz/LSB) 60.00000 kHz" "\@2:PRHighSpeedDrivePhase: V (0.005493164 º/LSB) 0 º" "\@3:PRHighSpeedDrivePhase: V (0.005493164 º/LSB) 0 º" "\@2:ACBiasAmpl: V (0.3051758 mV/LSB) 0 mV" "\@3:ACBiasAmpl: V (0.3051758 mV/LSB) 0 mV" "\@2:BiasFrequency: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@3:BiasFrequency: V (0.0000116415 kHz/LSB) 0.5000000 kHz" "\@2:SCMLockInBW: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@3:SCMLockInBW: V (0.001000000 kHz/LSB) 0.5000000 kHz" "\@2:SCMLockInPhase: V (0.005493164 º/LSB) 0 º" "\@3:SCMLockInPhase: V (0.005493164 º/LSB) 0 º" "\@2:DCBias: V (0.0003051758 V/LSB) 0 V" "\@3:DCBias: V (0.0003051758 V/LSB) 0 V" "\@2:Capacitance Sensor Frequency: V (0.03204346 MHz/LSB) 880.0000 MHz" "\@3:Capacitance Sensor Frequency: V (0.03204346 MHz/LSB) 880.0000 MHz" "\@2:SCMIgain: V (0.001525879 1/LSB) 10.00000 " "\@3:SCMIgain: V (0.001525879 1/LSB) 10.00000 " "\@2:SCMPgain: V (0.001525879 1/LSB) 10.00000 " "\@3:SCMPgain: V (0.001525879 1/LSB) 10.00000 " "\@2:SCMFeedbackSetpoint: V (0.06103516 mV/LSB) 200.0000 mV" "\@3:SCMFeedbackSetpoint: V (0.06103516 mV/LSB) 200.0000 mV" "\@2:SCMFeedbackUpperLimit: V (0.0003051758 V/LSB) 6.000000 V" "\@3:SCMFeedbackUpperLimit: V (0.0003051758 V/LSB) 6.000000 V" "\@2:DC Sample Bias: V [Sens. biassens] (0.0003051758 V/LSB) 0 V" "\@3:DC Sample Bias: V [Sens. biassens] (0.0003051758 V/LSB) 0 V" "\@2:Bias Upper Limit: V (0.0003051758 V/LSB) 0 V" "\@3:Bias Upper Limit: V (0.0003051758 V/LSB) 0 V" "\@2:Bias Lower Limit: V (0.0003051758 V/LSB) 0 V" "\@3:Bias Lower Limit: V (0.0003051758 V/LSB) 0 V" "\@2:Feedback Igain: V (0.01525879 1/LSB) 0 " "\@3:Feedback Igain: V (0.01525879 1/LSB) 0 " "\@2:TunaFeedbackSetpoint: V [Sens. tunaSens] (0.0003750000 V/LSB) 0 V" "\@3:TunaFeedbackSetpoint: V [Sens. tunaSens] (0.0003750000 V/LSB) 0 V" "\@2:DriveFrequency3: V (0.0000001164 kHz/LSB) 0.005000000 kHz" "\@3:DriveFrequency3: V (0.0000001164 kHz/LSB) 0.005000000 kHz" "\@2:DriveAmplitude3: V (0.3051758 mV/LSB) 0 mV" "\@3:DriveAmplitude3: V (0.3051758 mV/LSB) 0 mV" "\@2:Drive3 DC Offset: V (0.0003051758 V/LSB) 0 V" "\@3:Drive3 DC Offset: V (0.0003051758 V/LSB) 0 V" "\@2:ReferenceFrequency3: V (0.0000001164 kHz/LSB) 0.005000000 kHz" "\@3:ReferenceFrequency3: V (0.0000001164 kHz/LSB) 0.005000000 kHz" "\@2:LockIn3BW: V (0.001000000 kHz/LSB) 0.005000000 kHz" "\@3:LockIn3BW: V (0.001000000 kHz/LSB) 0.005000000 kHz" "\@2:Sample Bias: V (0.3051758 mV/LSB) 0 mV" "\@3:Sample Bias: V (0.3051758 mV/LSB) 0 mV" "\@2:Tip Bias: V (0.0003662109 V/LSB) 0 V" "\@3:Tip Bias: V (0.0003662109 V/LSB) 0 V" "\@2:Analog3: V (0.0003051758 V/LSB) 0 V" "\@3:Analog3: V (0.0003051758 V/LSB) 0 V" "\@2:Analog4: V (0.0003051758 V/LSB) 0.5499268 V" "\@3:Analog4: V (0.0003051758 V/LSB) 0 V" "\@2:TR Drive Amplitude: V (0.3051758 mV/LSB) 0 mV" "\@3:TR Drive Amplitude: V (0.3051758 mV/LSB) 0 mV" "\@2:TR Lock-In Phase: V (0.005493164 º/LSB) 0 º" "\@3:TR Lock-In Phase: V (0.005493164 º/LSB) 0 º" "\@2:DrivePhase3: V (0.005493164 º/LSB) 0 º" "\@3:DrivePhase3: V (0.005493164 º/LSB) 0 º" "\@2:SSRMSampleBias: V (0.0003051758 V/LSB) 0 V" "\@3:SSRMSampleBias: V (0.0003051758 V/LSB) 0 V" "\@2:SSRMSampleBiasUDAC: V (0.0003051758 V/LSB) 0 V" "\@3:SSRMSampleBiasUDAC: V (0.0003051758 V/LSB) 0 V" "\@2:TMFbIgain: V (0.9375000 1/LSB) 5.000000 " "\@3:TMFbIgain: V (0.9375000 1/LSB) 0.5000000 " "\@2:TMFbPgain: V (0.9375000 1/LSB) 10.00000 " "\@3:TMFbPgain: V (0.9375000 1/LSB) 5.000000 " "\@2:STMFbIgain: V (0.3125000 1/LSB) 1.000000 " "\@3:STMFbIgain: V (0.3125000 1/LSB) 1.000000 " "\@2:STMFbPgain: V (0.3125000 1/LSB) 2.000000 " "\@3:STMFbPgain: V (0.3125000 1/LSB) 0 " "\@2:STMESFbIgain: V (0.3125000 1/LSB) 10.00000 " "\@3:STMESFbIgain: V (0.3125000 1/LSB) 10.00000 " "\@2:STMESFbPgain: V (0.3125000 1/LSB) 0 " "\@3:STMESFbPgain: V (0.3125000 1/LSB) 0 " "\@2:AFMFbIgain: V (0.3125000 1/LSB) 2.000000 " "\@3:AFMFbIgain: V (0.3125000 1/LSB) 2.000000 " "\@2:AFMFbPgain: V (0.3125000 1/LSB) 5.000000 " "\@3:AFMFbPgain: V (0.3125000 1/LSB) 5.000000 " "\@2:DeflLowPassFrequency: V (0.001000000 kHz/LSB) 2.500000 kHz" "\@3:DeflLowPassFrequency: V (0.001000000 kHz/LSB) 2.500000 kHz" "\@2:FricLowPassFrequency: V (0.001000000 kHz/LSB) 2.000000 kHz" "\@3:FricLowPassFrequency: V (0.001000000 kHz/LSB) 2.000000 kHz" "\@2:TMDeflLowPassFrequency: V (0.001000000 kHz/LSB) 2.500000 kHz" "\@3:TMDeflLowPassFrequency: V (0.001000000 kHz/LSB) 2.000000 kHz" "\@2:CurrentLowPassFrequency: V (0.001000000 kHz/LSB) 10.00000 kHz" "\@3:CurrentLowPassFrequency: V (0.001000000 kHz/LSB) 10.00000 kHz" "\@2:OtherModesLowPassFrequency: V (0.001000000 kHz/LSB) 2.000000 kHz" "\@3:OtherModesLowPassFrequency: V (0.001000000 kHz/LSB) 2.000000 kHz" "\@2:FastZTMFbIgain: V (0.03125000 1/LSB) 1.000000 " "\@3:FastZTMFbIgain: V (0.03125000 1/LSB) 1.000000 " "\@2:FastZTMFbPgain: V (0.03125000 1/LSB) 1.000000 " "\@3:FastZTMFbPgain: V (0.03125000 1/LSB) 0 " "\@2:InputIgain: V (0.001525879 1/LSB) 10.00000 " "\@3:InputIgain: V (0.001525879 1/LSB) 10.00000 " "\@2:InputPgain: V (0.001525879 1/LSB) 10.00000 " "\@3:InputPgain: V (0.001525879 1/LSB) 10.00000 " "\@2:TRFbIgain: V (0.3125000 1/LSB) 0.5000000 " "\@3:TRFbIgain: V (0.3125000 1/LSB) 0.5000000 " "\@2:TRFbPgain: V (0.3125000 1/LSB) 5.000000 " "\@3:TRFbPgain: V (0.3125000 1/LSB) 5.000000 " "\@2:VertDeflLowPassFrequency: V (0.001000000 kHz/LSB) 10.00000 kHz" "\@3:VertDeflLowPassFrequency: V (0.001000000 kHz/LSB) 10.00000 kHz" "\@2:TRLockInBW1: V (0.001000000 kHz/LSB) 150.0000 kHz" "\@3:TRLockInBW1: V (0.001000000 kHz/LSB) 150.0000 kHz" "\@2:Output 1 Input Data: S [Height] "Height"" "\@2:Output 2 Input Data: S [Height] "Height"" "\@2:Output 1 Output Data: S [Analog3] "Analog3"" "\@2:Output 2 Output Data: S [Analog3] "Analog3"" "\@LogStiffnessOffset: V [Sens. LogStiffnessSens] (0.0004882813 log(Arb)/LSB) 0 log(Arb)" "\*Fast Scan list" "\Phase Shift: 508" "\Fast Integral Gain: 20" "\Fast Proportional Gain: 20" "\Fast Interleave Igain: 0" "\Fast Interleave Pgain: 0" "\Contact Gain: 123" "\Q-Control Gain: 0" "\QC Interleave Gain: 0" "\QC Lift Gain: 0" "\Z Sensor CL IGain: 3" "\Z Sensor CL PGain: 3" "\Z Sensor Preamp Gain: 2.42789" "\Z Sensor Preamp Offset: -0.0174603" "\Z Sensor Preamp Auto: Enabled" "\High Pass Filter: 1" "\Low Pass Filter: 1" "\All Pass Filter: 1" "\Interleave Mode: Disabled" "\Lift Mode: Disabled" "\QC Interleave Mode: Disabled" "\QC Lift Mode: Disabled" "\Closed Loop: Disabled" "\Tapping Engage Fast I Gain: 10" "\Tapping Engage Fast P Gain: 10" "\Contact Engage Fast I Gain: 5" "\Contact Engage Fast P Gain: 5" "\Tapping Minimum Scanning I Gain: 0.1" "\Tapping Minimum Scanning P Gain: 0.1" "\Contact Minimum Scanning I Gain: 0.1" "\Contact Minimum Scanning P Gain: 0.1" "\Tapping Maximum Scan Rate: 3" "\Contact Maximum Scan Rate: 4" "\Determine Contact Gain: Enabled" "\Check for active tip: Enabled" "\XY Threshold: 50" "\X IGain: 6" "\X PGain: 6" "\Y IGain: 6" "\Y PGain: 6" "\*Ciao image list" "\Data offset: 40960" "\Data length: 524288" "\Bytes/pixel: 2" "\Start context: OL" "\Data type: AFM" "\Plane fit: 971 5241 -6571.75 2" "\Frame direction: Down" "\Stage X: 0" "\Stage Y: 0" "\Stage type: N/A" "\Profile length: 0" "\Profile speed [um/s]: 0" "\Capture start line: 0" "\Samps/line: 512" "\Number of lines: 512" "\Aspect Ratio: 1:1" "\Scan Size: 100 100 ~m" "\Scan Line: Main" "\Line Direction: Retrace" "\Highpass: 0" "\Lowpass: 0" "\Realtime Planefit: Line" "\Offline Planefit: Full" "\Valid data start X: 0" "\Valid data start Y: 0" "\Valid data len X: 512" "\Valid data len Y: 512" "\Tip x width correction factor: 1" "\Tip y width correction factor: 1" "\Tip x width correction factor sigma: 1" "\Tip y width correction factor sigma: 1" "\@2:Image Data: S [Height] "Height"" "\@Z magnify: C [2:Z scale] 0.6129351 " "\@2:Z scale: V [Sens. Zsens] (0.002288735 V/LSB) 94.76734 V" "\@2:Z offset: V [Sens. Zsens] (0.002288735 V/LSB) 0 V" "\*Ciao image list" "\Data offset: 565248" "\Data length: 524288" "\Bytes/pixel: 2" "\Start context: OL" "\Data type: AFM" "\Plane fit: 0 0 0 5" "\Frame direction: Down" "\Stage X: 0" "\Stage Y: 0" "\Stage type: N/A" "\Profile length: 0" "\Profile speed [um/s]: 0" "\Capture start line: 0" "\Samps/line: 512" "\Number of lines: 512" "\Aspect Ratio: 1:1" "\Scan Size: 100 100 ~m" "\Scan Line: Main" "\Line Direction: Retrace" "\Highpass: 0" "\Lowpass: 0" "\Realtime Planefit: None" "\Offline Planefit: None" "\Valid data start X: 0" "\Valid data start Y: 0" "\Valid data len X: 512" "\Valid data len Y: 512" "\Tip x width correction factor: 1" "\Tip y width correction factor: 1" "\Tip x width correction factor sigma: 1" "\Tip y width correction factor sigma: 1" "\@2:Image Data: S [AmplitudeError] "Amplitude Error"" "\@Z magnify: C [2:Z scale] 0.02500038 " "\@2:Z scale: V [Sens. Amplitude Error] (0.03051758 mV/LSB) 1999.969 mV" "\@2:Z offset: V [Sens. Amplitude Error] (0.03051758 mV/LSB) 0 mV" "\*Ciao image list" "\Data offset: 1089536" "\Data length: 524288" "\Bytes/pixel: 2" "\Start context: OL" "\Data type: AFM" "\Plane fit: 0 0 0 5" "\Frame direction: Down" "\Stage X: 0" "\Stage Y: 0" "\Stage type: N/A" "\Profile length: 0" "\Profile speed [um/s]: 0" "\Capture start line: 0" "\Samps/line: 512" "\Number of lines: 512" "\Aspect Ratio: 1:1" "\Scan Size: 100 100 ~m" "\Scan Line: Main" "\Line Direction: Retrace" "\Highpass: 0" "\Lowpass: 0" "\Realtime Planefit: None" "\Offline Planefit: None" "\Valid data start X: 0" "\Valid data start Y: 0" "\Valid data len X: 512" "\Valid data len Y: 512" "\Tip x width correction factor: 1" "\Tip y width correction factor: 1" "\Tip x width correction factor sigma: 1" "\Tip y width correction factor sigma: 1" "\@2:Image Data: S [Phase] "Phase"" "\@Z magnify: C [2:Z scale] 1.000015 " "\@2:Z scale: V [Sens. Phase] (0.005493164 º/LSB) 359.9945 º" "\@2:Z offset: V [Sens. Phase] (0.005493164 º/LSB) 0 º" "\*File list end" Height(nm) Amplitude_Error(V) Phase(º) 5.207955e+002 -8.849960e-004 9.530495e+000 6.253530e+002 1.269512e-002 1.094222e+001 7.198281e+002 1.452614e-002 7.223401e+000 8.345922e+002 1.959198e-002 9.189923e+000 9.626751e+002 2.874711e-002 1.109602e+001 1.005245e+003 -8.910995e-003 1.003036e+001 9.930465e+002 -1.589941e-002 8.464837e+000 8.920988e+002 -1.379373e-002 1.622656e+001 8.134318e+002 -1.049788e-002 1.928621e+001 7.021528e+002 -8.239619e-004 9.563453e+000 5.850237e+002 -1.531959e-002 1.719334e+001 4.803418e+002 -1.733372e-002 8.124266e+000 3.395627e+002 -2.188076e-002 1.430398e+001 1.715240e+002 -1.940888e-002 1.193097e+001 4.605505e+001 -1.739475e-002 1.514992e+001 -8.426830e+001 -1.333597e-002 1.434793e+001 -2.016465e+002 -1.934784e-002 8.827380e+000 -2.784464e+002 -1.739475e-002 9.717259e+000 -3.340858e+002 -9.368751e-003 9.876558e+000 -3.293559e+002 3.256175e-002 1.184857e+001 -2.126001e+002 5.401528e-003 1.235394e+001 -1.447622e+002 1.272563e-002 1.790195e+001 -8.713118e-001 1.409890e-002 8.640615e+000 1.758805e+002 1.010116e-002 1.111799e+001 2.607712e+002 2.267421e-002 1.914888e+001 3.965714e+002 1.623510e-002 1.051925e+001 3.986874e+002 -1.074202e-002 8.206662e+000 3.299782e+002 6.103421e-005 6.273098e+000 2.234292e+002 -1.553321e-002 1.568274e+001 1.620640e+002 -1.391580e-002 5.476601e+000 1.962941e+002 1.919526e-002 1.032699e+001 2.932587e+002 1.223736e-002 9.673314e+000 2.992334e+002 -1.861543e-002 7.146497e+000 2.759569e+002 1.013168e-002 1.077742e+001 3.047102e+002 6.561178e-003 1.702306e+001 2.421002e+002 -1.266460e-002 1.095320e+001 3.354550e+002 1.654027e-002 1.104658e+001 4.279386e+002 1.763889e-002 1.071700e+001 4.972701e+002 8.636340e-003 1.059066e+001 5.063566e+002 -4.028258e-003 1.089278e+001 5.702114e+002 5.035322e-003 1.394693e+001 6.346884e+002 2.828936e-002 2.118681e+001 7.107415e+002 5.187908e-003 1.501259e+001 7.698662e+002 -1.260356e-002 1.426553e+001 7.800730e+002 1.141340e-002 1.468850e+001 8.623497e+002 1.541114e-002 1.167829e+001 8.431809e+002 -1.708958e-002 6.481835e+000 8.342188e+002 1.293925e-002 1.069503e+001 8.370817e+002 -6.286524e-003 1.528724e+001 8.724321e+002 1.498390e-002 1.150251e+001 8.872444e+002 -1.583838e-002 1.248028e+001 8.828878e+002 1.004013e-002 1.330973e+001 8.587401e+002 3.051711e-005 1.161786e+001 8.045942e+002 -1.257305e-002 8.404413e+000 7.032731e+002 -3.030349e-002 1.463906e+001 5.078503e+002 -2.822832e-002 5.976471e+000 3.308495e+002 -2.200283e-002 1.528724e+001 1.321904e+002 -2.597006e-002 1.583106e+001 -4.456137e+001 -1.345804e-002 1.614966e+001 -2.285326e+002 -2.563437e-002 8.453851e+000 -4.159892e+002 -1.605200e-002 1.583106e+001 -5.717050e+002 -2.831987e-002 8.799914e+000 -7.284167e+002 -1.409890e-002 1.027755e+001 -6.468868e+002 2.313197e-002 1.074446e+001 -4.935359e+002 1.220684e-002 1.592993e+001 -3.573623e+002 1.187115e-002 1.387552e+001 -2.189482e+002 4.183895e-002 1.210675e+001 8.339699e+000 8.056516e-003 1.784152e+001 5.638632e+001 1.739475e-003 2.091216e+001 5.402133e+001 3.753604e-003 1.672643e+001 -6.572181e+001 -1.513648e-002 1.199689e+001 -1.137684e+002 -1.248150e-002 6.882830e+000 -1.716484e+002 -4.424980e-003 1.231549e+001 -2.567881e+002 -2.654988e-003 7.201428e+000 -2.307732e+002 9.246683e-003 8.173703e+000 -2.223090e+002 -1.556372e-003 9.766697e+000 -2.316445e+002 -1.638769e-002 9.623877e+000 -2.735919e+002 -7.598759e-003 1.585303e+001 -3.037144e+002 5.309976e-003 1.115645e+001 -2.903958e+002 1.089461e-002 1.012924e+001 -2.489462e+002 7.232554e-003 9.541480e+000 -2.198195e+002 -5.309976e-003 7.756229e+000 -1.461314e+002 3.448433e-003 7.712285e+000 -1.104077e+002 1.013168e-002 4.619680e+000 -7.182099e+001 1.013168e-002 1.214520e+001 -1.328128e+002 -2.395593e-002 1.161786e+001 -2.302753e+002 -4.913254e-003 1.653967e+001 -3.472800e+002 -2.572592e-002 6.597189e+000 -4.527087e+002 -1.052840e-002 1.338114e+001 -5.298821e+002 -1.715061e-002 5.537025e+000 -6.817393e+002 -5.401528e-003 9.156964e+000 -8.057145e+002 -1.779147e-002 9.618383e+000 -9.330505e+002 -2.856401e-002 5.548011e+000 -1.094990e+003 -1.034530e-002 1.382608e+001 -1.187349e+003 -1.251201e-003 6.772968e+000 -1.040844e+003 2.157559e-002 7.151990e+000 -8.723076e+002 2.746539e-002 8.503288e+000 -6.680472e+002 2.639730e-002 9.980927e+000 -4.428754e+002 3.469795e-002 1.128279e+001 -1.987836e+002 3.472847e-002 1.441384e+001 5.451923e+001 1.657079e-002 1.341959e+001 1.662961e+002 3.091383e-002 1.788547e+001 3.398116e+002 1.998870e-002 1.956635e+001 4.303036e+002 -1.016220e-002 1.112898e+001 4.949051e+002 1.827975e-002 1.110151e+001 5.632408e+002 1.620458e-002 1.069503e+001 5.962263e+002 -2.072112e-002 6.525779e+000 5.786755e+002 2.038543e-002 8.415399e+000 6.009562e+002 -4.180843e-003 6.756489e+000 5.840279e+002 -6.530661e-003 9.640356e+000 5.988401e+002 1.501442e-002 1.117842e+001 6.153951e+002 -1.629613e-002 1.480385e+001 6.099183e+002 1.324442e-002 1.815463e+001 7.099947e+002 1.556372e-002 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